Silicon on Insulator (SOI) Wafers

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Silicon on Insulator (SOI) Wafers

$715.00

Silicon on Insulator (SOI) wafers are key materials for high-performance microelectronics and optoelectronics. They consist of a top silicon layer, a buried oxide layer, and a silicon substrate, offering advantages like reduced parasitic capacitance, improved power efficiency, and superior thermal management. These features make SOI wafers ideal for applications in low-power, high-speed devices, RF circuits, and MEMS.

SOI wafers come in various configurations, including thin and thick device layers, to meet specific design needs. The flexibility in thickness and doping makes them suitable for a range of advanced technologies such as integrated circuits, sensors, and high-speed communication systems.

Firebird Optics mostly provides these in custom configurations. Please contact us for a quote at info@firebirdoptics.com.

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Specs for Silicon on Insulator (SOI) Semiconductor Wafers:

  • Single Side Polished (SSP) or Double Side Polished (DSP)

  • Standard Orientation (100). Others 110 and 111 available upon request.

  • Growth Method: CZ

  • Standard thickness: 200μm

  • Cleaning/Packaging: Class 100 cleanroom and vacuum packaging.

Silicon on Insulator (SOI) Wafers: Manufacturing and Applications

What are Silicon on Insulator (SOI) Wafers?

Silicon on Insulator (SOI) wafers are a key component in advanced semiconductor devices. They consist of a thin layer of silicon, a buried insulating layer (usually silicon dioxide), and a supporting silicon substrate. This layered structure improves electrical performance by reducing parasitic capacitance, minimizing leakage currents, and enhancing thermal conductivity. These advantages make SOI wafers ideal for low-power, high-speed applications in microelectronics, optoelectronics, and sensor technologies.

How Are SOI Wafers Manufactured?

The production of SOI wafers involves several complex processes, designed to create precise thin silicon layers over an insulator. The two main methods used for manufacturing SOI wafers are:

1. Separation by IMplantation of OXygen (SIMOX)

In the SIMOX process, oxygen ions are implanted into a silicon wafer at high energy, creating a buried oxide layer. The wafer is then annealed at high temperatures to repair damage from the implantation and to form a uniform silicon dioxide layer. This method is widely used for high-voltage, radiation-hardened, and high-frequency applications.

2. Bonded Wafer Process

In this method, two silicon wafers are bonded together, with a layer of silicon dioxide in between. One of the silicon wafers is then thinned down to the desired thickness, creating the thin top silicon layer. This technique allows for high precision in the control of the silicon and oxide layer thickness, making it ideal for custom applications where exact specifications are critical.

Applications of SOI Wafers

1. Microelectronics

SOI wafers are widely used in microelectronics, particularly in the production of high-speed, low-power integrated circuits. By minimizing parasitic capacitance, SOI-based devices can operate at lower power and higher speeds compared to traditional bulk silicon devices. They are also used in advanced technologies like fully depleted SOI (FD-SOI) transistors, which offer excellent energy efficiency for mobile devices and servers.

2. MEMS (Micro-Electro-Mechanical Systems)

SOI wafers are essential for the development of MEMS devices, which require precise control over material properties. The insulating layer in SOI wafers acts as an etch stop during the fabrication process, enabling more accurate and complex microstructures. These properties are crucial for the development of accelerometers, gyroscopes, and other MEMS sensors used in automotive, aerospace, and consumer electronics industries.

3. RF and Power Electronics

SOI technology is increasingly used in RF (radio frequency) and power electronics due to its ability to isolate active devices from the substrate, thereby reducing cross-talk and improving overall performance. RF SOI wafers are utilized in applications such as antenna switches, tuners, and low-noise amplifiers for mobile phones and wireless communication systems.

Future Trends and Advancements

The demand for SOI wafers continues to grow as new technologies like 5G, Internet of Things (IoT), and autonomous systems evolve. Advances in SOI technology, such as the development of ultra-thin body and box (UTBB) wafers and strained silicon-on-insulator (sSOI), are enabling even greater performance in next-generation devices.